题目：Laser Precision Engineering: from Microprocessing to Nanofabrication

报告人：Prof. Hong Minghui (ECE Department, National University of Singapore)

主持人：李向平研究员

时间：2017年1月4日上午10:00

地点：曾宪梓科学馆405会议室

报告摘要：

In the last decades, we have witnessed extensive applications of laser precision engineering in the fields from academic researches to production lines. In this talk, our research progress on dynamic laser-materials interaction and the signal diagnostics in real time will be reviewed. How to achieve small heat affected zone (HAZ) is a key issue in high quality laser micro-processing and nano-manufacturing. Hybrid laser processing can lead to laser precision engineering of difficultly processing substrates, such as heat sensitive and ultra-thin substrate devices. Optimization of laser-materials interaction can provide us novel approaches to overcome optical diffraction limit for sub-wavelength surface patterning. Combined with advanced AFM and NSOM means, laser processing resolution can be pushed down to sub-50 nm. To solve the technical bottleneck of slow laser nanoprocessing, parallel (multi-beam) and maskless laser processing techniques are developed. Potential and challenges of laser-materials interaction to cater for 22nm and beyond based on laser produced plasma (LPP) EUV light source and flexible laser manipulation of atom deposition for atomic engineering will also be discussed.

报告人简介：

Prof. Hong is currently a Full Professor and the Director of Optical Science and Engineering Centre (OSEC), Department of Electrical and Computer Engineering, National University of Singapore. He specializes in laser microprocessing & nanofabrication, optical engineering and applications. He has co-authored 10 book chapters, 24 patents granted, and 400+ scientific papers in Nature, Chemical Reviews, Nature Nanotechnology, Advanced Materials, Nano Letters, Light: Science and Applications, ACS Nano, Science Advances, Nature Communications, and Laser & Photonics Reviews etc. and 60+ plenary/keynote/invited talks in international conferences. Prof. Hong is Fellow of Optical Society of America (OSA), Fellow of International Society for Optics and Photonics (SPIE), and Founding Fellow of International Academy of Photonics and Laser Engineering (IAPLE) and Fellow of Institute of Engineers, Singapore (IES).

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光子技术研究院

2016年12月30日